Synthesis and Etch Characteristics of Organic-Inorganic Hybrid Hard-Mask Materials
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Korea Academia-Industrial cooperation Society
سال: 2011
ISSN: 1975-4701
DOI: 10.5762/kais.2011.12.4.1993